Skip to content
#

euv

Here are 14 public repositories matching this topic...

Physics-accurate EUV lithography simulator — LPP Sn-plasma source, CXRO materials, multilayer TMM optics, RCWA 1D/2D mask3D, Abbe/Hopkins aerial imaging with partial coherence, resist chain (Dill ABC, PEB, development, shot noise), process window (Bossung, DoF/EL), resist calibration from wafer data. Apache-2.0, 534 tests, 6 verified notebooks.

  • Updated Aug 17, 2026
  • Jupyter Notebook

Improve this page

Add a description, image, and links to the euv topic page so that developers can more easily learn about it.

Curate this topic

Add this topic to your repo

To associate your repository with the euv topic, visit your repo's landing page and select "manage topics."

Learn more